Integrated Devices in Semiconductor Packages and Methods of Forming Same

ABSTRACT

An embodiment package comprises an integrated circuit die encapsulated in an encapsulant, a patch antenna over the integrated circuit die, and a dielectric feature disposed between the integrated circuit die and the patch antenna. The patch antenna overlaps the integrated circuit die in a top-down view. The thickness of the dielectric feature is in accordance with an operating bandwidth of the patch antenna.

PRIORITY CLAIM AND CROSS-REFERENCE

This patent application is a continuation of and claims priority to U.S.Pat. Application No. 17/222,249, filed on Apr. 5, 2021, entitled“Integrated Devices in Semiconductor Packages and Methods of FormingSame,” which is a continuation of and claims priority to U.S. Pat.Application No. 16/511,245, filed on Jul. 15, 2019, now U.S. Pat. No.10,971,460 issued on Apr. 6, 2021, entitled “Integrated Devices inSemiconductor Packages and Methods of Forming Same,” which is adivisional of and claims priority to U.S. Pat. Application No.15/725,677, filed on Oct. 5, 2017, now U.S. Pat. No. 10,354,964 issuedon Jul. 16, 2019, entitled “Integrated Devices in Semiconductor Packagesand Methods of Forming Same,” which claims priority to U.S. ProvisionalApplication No. 62/463,445, filed on Feb. 24, 2017 and entitled“Integrated Antennas in Semiconductor Packages and Methods of FormingSame,” which applications are hereby incorporated by reference herein asif reproduced in their entireties.

BACKGROUND

The semiconductor industry has experienced rapid growth due to ongoingimprovements in the integration density of a variety of electroniccomponents (e.g., transistors, diodes, resistors, capacitors, etc.). Forthe most part, improvement in integration density has resulted fromiterative reduction of minimum feature size, which allows morecomponents to be integrated into a given area. As the demand forshrinking electronic devices has grown, a need for smaller and morecreative packaging techniques of semiconductor dies has emerged. Anexample of such packaging systems is Package-on-Package (PoP)technology. In a PoP device, a top semiconductor package is stacked ontop of a bottom semiconductor package to provide a high level ofintegration and component density. PoP technology generally enablesproduction of semiconductor devices with enhanced functionalities andsmall footprints on a printed circuit board (PCB).

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A, 1B, and 1C illustrate varying views of a semiconductor packagein accordance with some embodiments.

FIGS. 2A, 2B, 2C, 2D, and 2E illustrate cross-sectional views of aportion of a semiconductor package in accordance with some embodiments.

FIGS. 3A, 3B, and 3C illustrate varying views of a semiconductor packagein accordance with some alternative embodiments.

FIGS. 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21,22, 23, 24, and 25 illustrate cross-sectional views of variousintermediary stages of manufacturing a semiconductor package inaccordance with some embodiments.

FIGS. 26A and 26B illustrate varying views of a semiconductor package inaccordance with some alternative embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature’s relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Embodiments discussed herein may be discussed in a specific context,namely a package structure having one or more integrated antennas andone or more semiconductor chips (e.g., a radio frequency (RF) chip,baseband chip, etc.). However, various embodiments may also be appliedto other packages having embedded functional elements (e.g., waveguidelines) integrated with one or more semiconductor chips.

In embodiments having an integrated antenna, the integrated antennasinclude a patch antenna having one or more signal lines (also referredto herein as feed lines), a ground element, and one or more radiatingelements. During operation, the RF chip receives and transmits signalsto and from the radiating elements of the patch antenna through the feedlines. The ground element comprises a ground line and/or a ground planeproviding electrical ground for the one or more radiating elements. Byintegrating antennas and semiconductor chips in a single package,reductions in size can be achieved.

In order to advantageously achieve a small package footprint, portionsof the patch antenna overlap at least one semiconductor chip in a topdown view. However, it has been observed that this overlap can result inreduced efficiency of the patch antenna due to interference caused bythe semiconductor chip. Various embodiments aim to improve theefficiency of the patch antenna and reduce interference from thesemiconductor chip by disposing a dielectric feature between thesemiconductor chip and the patch antenna (e.g., feed lines and groundelement(s) of the patch antenna). In some embodiments, the dielectricfeature comprises a die attach film (DAF) used to attach thesemiconductor chip to the package during manufacturing. A thickness ofthe dielectric feature is selected in order to achieve a desiredefficiency for the patch antenna. The thickness may further correspondto a distance between the patch antenna and the semiconductor chip. Forexample, it has been observed that a relatively thick dielectric featuremay provide improved isolation between the patch antenna and thesemiconductor chip. In some embodiments, the thickness of the dielectricfeature is selected based on an operating bandwidth of the antenna, ak-value of the dielectric feature, an area of various features of thepatch antenna, a desired efficiency of the patch antenna, combinationsthereof, and the like.

FIG. 1A illustrates a cross-sectional view of a semiconductor package250 in accordance with some embodiments. FIGS. 1B and 1C illustratetop-down views of the semiconductor package 250 in accordance with someembodiments. The cross-sectional view of FIG. 1A is taken alone lines1A-1A of FIGS. 1B and 1C.

Referring first to FIG. 1A, the semiconductor package 250 includes anintegrated circuit die 114 encapsulated in an encapsulant 130. Theintegrated circuit die 114 may be a radio frequency (RF) chip, which mayor may not include a baseband processor integrated within the integratedcircuit die 114. Although only one integrated circuit die is illustratedin the semiconductor package 250, multiple integrated circuit dies 114(e.g., a separate baseband chip, processors, memory, etc.) may beintegrated in a single semiconductor package in other embodimentsdepending on package design. In such embodiments, each of the multipleintegrated circuit dies 114 may be encapsulated in the encapsulant 130.

During operation, the integrated circuit die 114 transmits and receiveswireless signals by way of one or more antennas integrated in thesemiconductor package 250. For example, semiconductor package 250includes a patch antenna 210 comprising a ground element 106A, feedlines 106B, a portion of a dielectric layer 200, and radiating elements204. In package 250, the ground layer 106A and the feed lines 106B aredisposed in a same layer. For example, the feed lines 106B may bedisposed in openings extending through the ground element 106A asillustrated by FIGS. 1A and 1C. In the embodiments of FIGS. 1A, 1B, and1C, ground element 106A may further provide shielding (e.g.,electromagnetic radiation shielding) for the feed lines 106B. Top andbottom surfaces of the ground 106A and the feed lines 106B may besubstantially coplanar. The locations of the radiation elements 204 aremarked as dashed lines in FIG. 1C for reference. Other configurations(e.g., having a greater or fewer number of feed lines) of an embodimentpatch antenna may be used in other embodiments.

The integrated circuit die 114 is electrically connected to the groundelement 106A and the feed lines 106B through redistribution lines inredistribution structure 170 and conductive vias 110. For example, theredistribution structures 170 may include a plurality of conductiveredistribution lines disposed in one or more dielectric layers. Theconductive vias 110 are disposed in the molding compound 130 andelectrically connect the ground element 106A and the feed lines 106B tothe redistribution lines in the redistribution structure 170. Thus, theconductive vias 110 electrically connects the ground element 106A andthe feed lines 106B to the integrated circuit die 114. Theredistribution lines in the redistribution structure 170 furtherelectrically connects the integrated circuit die 114 to externalconnectors 166, which may be used to bond the package 250 to anotherpackage component, such as, a package substrate (see FIG. 25 ).

In some embodiments, the radiating elements 204 are separated from theground element 106A and the feed lines 106B by dielectric layer 200 andoptional dielectric layer 104. For example, the radiating elements 204may be adhered to a surface of the dielectric layer 200 opposing theground element 106A/feed lines 106B. The radiating elements 204 may beadhered to the dielectric layer 200 using an adhesive 202, or theadhesive 202 may be omitted. The radiating elements 204 are electricallycoupled to the ground element 106A and the feed lines 106B. In someembodiments, a material of the dielectric layer 200 may be selected topromote this electric coupling and may have a relatively low dissipationfactor (DF). For example, a DF of the dielectric layer 200 may be lessthan about 0.01 or even less than about 0.001 in some embodiments. Theground element 106A may provide a ground plane for the radiatingelements 204, and the feed lines 106B relay signals 206 between theradiating elements 204 and the integrated circuit die 114. The radiatingelements 204, in turn, receive and transmit wireless signals 208 to andfrom other devices outside of the semiconductor package 250.

As illustrated by the top-down view of the package 250 provided by FIG.1B, the integrated circuit die 114 (shown in ghost in FIG. 1B) overlapswith the ground element 106A/feed lines 106B (shown in ghost in FIG.1B). This overlap of features may result in the patch antenna 210 (seeFIG. 1A) losing efficiency. For example, efficiency of the patch antenna210 may be lowered as a result of interference caused by the integratedcircuit die 114.

In order to reduce this interference and increase the efficiency of thepatch antenna 210, a dielectric feature 116 is juxtaposed between theintegrated circuit die 114 and the patch antenna 210 (e.g., the groundelement 106A/feed line 106B portions of the patch antenna 210). Thedielectric feature 116 improves isolation between the integrated circuitdie 114 and portions of the patch antenna 210 (e.g., the ground element106A/feed lines 106B). The dielectric feature 116 has a thickness d,which is measured from a surface of the patch antenna 210 facing theintegrated circuit die 114 to the integrated circuit die 114. In variousembodiments, the thickness d is relatively thick in order to providesuitable isolation between the integrated circuit die 114 and the patchantenna 210. While not being bound by any particular theory, it isbelieved that an efficiency of the patch antenna 210 can be approximatedas the parasitic capacitance between the integrated circuit die and theground element 106B/feed lines 106A. For example, a lower parasiticcapacitance between these features correlates with improved efficiencyof the patch antenna 210. Furthermore, the parasitic capacitance betweenthe integrated circuit die 114 and the ground element 106A/feed lines106B may satisfy the following:

$C \propto k\frac{A}{d} \propto \lambda$

where C is the parasitic capacitance between the integrated circuit die114 and the ground element 106A/feed lines 106B; κ the a k-value of thedielectric feature 116; d is the thickness d of the dielectric feature116; A is an area of the ground element 106A/feed lines 106B (e.g.,obtained by multiplying a length L by a width W of the ground element106A/feed lines 106B, see FIG. 1B); and λ is an operating wavelength ofthe patch antenna 210. Various embodiments manipulate one or more of theabove parameters in order to reduce parasitic capacitance C and improvethe efficiency of the patch antenna 210 in the package 250.

In various embodiments, the thickness d of the dielectric feature 116 isselected in accordance with an operating bandwidth (frequency) of thepatch antenna 210, a k-value of the dielectric feature 116, an area ofvarious features (e.g., the ground element 106A and/or the feed lines106B) of the patch antenna 210, a desired efficiency of the patchantenna 210, combinations thereof, and the like. For example, thethickness d of the dielectric feature 116 may be at least 100 µm when ak-value of the dielectric feature 116 is about 3 or greater and thepatch antenna 210 has an operating bandwidth of about 60 GHz. As anotherexample, the thickness d of the dielectric feature 116 may be at least30 µm when a k-value of the dielectric feature 116 is less than 3 (e.g.,about 1) and the patch antenna 210 has an operating bandwidth of about60 GHz. As another example, the thickness d of the dielectric feature116 may be at least about 50 µm when a k-value of the dielectric feature116 is about 3 or greater and the patch antenna 210 has an operatingbandwidth of about 77 GHz. As another example, the thickness d of thedielectric feature 116 may be at least about 15 µm when a k-value of thedielectric feature 116 is less than 3 (e.g., about 1) and the patchantenna 210 has an operating bandwidth of about 77 GHz. As anotherexample, the thickness d of the dielectric feature 116 may be at leastabout 120 µm when a k-value of the dielectric feature 116 is about 3 orgreater and the patch antenna 210 has an operating bandwidth of about 38GHz. As another example, the thickness d of the dielectric feature 116may be at least about 40 µm when a k-value of the dielectric feature 116is less than 3 (e.g., about 1) and the patch antenna 210 has anoperating bandwidth of about 38 GHz.

It has been observed that when the thickness d of the integrated circuitdie 114 is within the above values, an efficiency of the patch antenna210 is within 95% of an efficiency of a baseline patch antenna withoutinterference from an integrated circuit die. For example, experimentswere conducted on the patch antennas having operating bandwidths ofabout 77 GHz to about 81 GHz as well as patch antennas having operatingbandwidths of about 57 GHz and about 64 GHz. Comparisons were madebetween patch antennas integrated in packages having dielectric featureswith different thicknesses d of 0 µm, 20 µm, 40 µm, 50 µm, 60 µm, 80 µm,and 100 µm. Comparisons were also made between a baseline patch antennawithout interference from an integrated circuit die. When the thicknessd was 0 µm and the operating bandwidth of the patch antenna was about 77GHz to about 81 GHz, a gain of the patch antenna was 7.1 dBi and anefficiency of the patch antenna was 41%. When the thickness d was 20 µmand the operating bandwidth of the patch antenna was about 77 GHz toabout 81 GHz, a gain of the patch antenna was 9.7 dBi and an efficiencyof the patch antenna was 70%. When the thickness d was 40 µm and theoperating bandwidth of the patch antenna was about 77 GHz to about 81GHz, a gain of the patch antenna was 10.2 dBi and an efficiency of thepatch antenna was 82%. When the thickness d was 50 µm and the operatingbandwidth of the patch antenna was about 77 GHz to about 81 GHz, a gainof the patch antenna was 10.3 dBi and an efficiency of the patch antennawas 84%. When the thickness d was 60 µm and the operating bandwidth ofthe patch antenna was about 77 GHz to about 81 GHz, a gain of the patchantenna was 10.3 dBi and an efficiency of the patch antenna was 86%.When the thickness d was 80 µm and the operating bandwidth of the patchantenna was about 77 GHz to about 81 GHz, a gain of the patch antennawas 10.4 dBi and an efficiency of the patch antenna was 88%. When thethickness d was 100 µm and the operating bandwidth of the patch antennawas about 77 GHz to about 81 GHz, a gain of the patch antenna was 10.5dBi and an efficiency of the patch antenna was 89%. The baseline patchantenna having an operating bandwidth of about 77 GHz to about 81 GHzprovided a gain of 10.5 dBi and an efficiency of the baseline patchantenna was 90%. When the thickness d was 20 µm and the operatingbandwidth of the patch antenna was about 57 GHz to about 64 GHz,bandwidth specifications of the patch antenna failed, a gain of thepatch antenna was 3.95 dBi, and an efficiency of the patch antenna was42.4%. When the thickness d was 40 µm and the operating bandwidth of thepatch antenna was about 57 GHz to about 64 GHz, a gain of the patchantenna was 5.3 dBi, and an efficiency of the patch antenna was 66.3%.When the thickness d was 50 µm and the operating bandwidth of the patchantenna was about 57 GHz to about 64 GHz, a gain of the patch antennawas 5.48 dBi, and an efficiency of the patch antenna was 70.6%. When thethickness d was 60 µm and the operating bandwidth of the patch antennawas about 57 GHz to about 64 GHz, a gain of the patch antenna was 5.62dBi, and an efficiency of the patch antenna was 73.3%. When thethickness d was 100 µm and the operating bandwidth of the patch antennawas about 57 GHz to about 64 GHz, a gain of the patch antenna was 5.88dBi, and an efficiency of the patch antenna was 78.3%. The baselinepatch antenna having an operating bandwidth of about 57 GHz to about 64GHz provided a gain of 6.12 dBi and an efficiency of the baseline patchantenna was 82%.

All the above values assume a constant area A of the ground element106A/feed lines 106B. Generally, it has also been observed that reducingarea A of the ground element 106A/feed lines 106B may also allow for asmaller thickness d while still achieving a desired efficiency.

In FIG. 1A, the dielectric feature 116 is illustrated as a singledielectric layer. In other embodiments, the dielectric feature 116 mayhave any number of dielectric layers comprising different materials. Forexample, the dielectric feature 116 may have two dielectric layers 116Aand 116B (e.g., as illustrated by FIG. 2A) or three dielectric layers116A, 116B, and 116C (e.g., as illustrated by FIG. 2B). Each of thedielectric layers within the dielectric feature 116 may comprise a DAF,backside coating tape (LC) tape, a prepreg (PP) material, low-kmaterial, or the like. The dielectric feature 116 may have a same width(e.g., measured between opposing sidewalls of the dielectric feature116) as the integrated circuit die 114 (e.g., as illustrated by FIG.1A), have a larger width than the integrated circuit 114 (e.g., asillustrated by FIG. 2C), or have a smaller width than the integratedcircuit die 114 (e.g., as illustrated by FIG. 2D). Furthermore, each ofthe dielectric layers (e.g., layers 116A, 116B, and/or 116C) may have asame width (e.g., as illustrated by FIGS. 2A, 2B, 2C, and 2D) ordifferent widths (e.g., as illustrated by FIG. 2E). When the dielectricfeature 116 comprises multiple dielectric layers, a thickness and/ork-value of a dominant dielectric layer 116A may be used as anapproximation for calculating thickness d to reduce parasiticcapacitance. The dominant dielectric layer 116A may be a dielectriclayer occupying the majority of volume (e.g., greater than 50%, such asgreater than about 80%) of the overall dielectric feature 116. In otherembodiments, a weighted average of k-value and/or thicknesses may beused for calculating thickness d to reduce parasitic capacitance.

The semiconductor package 250 may further include additional antennas,such as, radiating antennas 108. In some embodiments, the radiatingantennas 108 comprise conductive features extending through theencapsulant 130. The radiating antennas 108 are electrically connectedto the integrated circuit die 114 by redistribution lines in theredistribution structure 170. A shape and configuration of the radiatingantennas 108 is selected to enable the sending and receiving of wirelesssignals to and from other devices (not illustrated) outside of package250. In other embodiments, the radiating antennas 108 may be omitted.

FIGS. 3A, 3B, and 3C illustrate varying views of a semiconductor package280 according to some embodiments. FIG. 3A illustrates a cross-sectionalview of semiconductor package 280; FIG. 3B illustrates top-down view ofa ground element 106A, and FIG. 3C illustrates a top-down view of feedlines 106B and optional ground elements 106C. Package 280 issubstantially similar to package 250 where like reference numeralsindicate like elements. In package 280, the ground element 106A and thefeed lines 106B are disposed in different layers. For example, theground element 106A may be disposed between the feed lines 106B and theintegrated circuit die along a line perpendicular to a lateral surfaceof semiconductor package 280. In some embodiments, optional additionalground elements 106C (see FIG. 3C) may be disposed in a same layer asthe feed lines 106B.

FIGS. 4 through 26 illustrate cross-sectional views of intermediatesteps during a process for forming the semiconductor package 250 inaccordance with some embodiments. FIG. 4 illustrates a carrier substrate100 and a release layer 102 formed on the carrier substrate 100. A firstpackage region 600 and a second package region 602 for the formation ofa first package and a second package, respectively, are illustrated.

The carrier substrate 100 may be a glass carrier substrate, a ceramiccarrier substrate, or the like. The carrier substrate 100 may be awafer, such that multiple packages can be formed on the carriersubstrate 100 simultaneously. The release layer 102 may be formed of apolymer-based material, which may be removed along with the carriersubstrate 100 from the overlying structures that will be formed insubsequent steps. In some embodiments, the release layer 102 is anepoxy-based thermal-release material, which loses its adhesive propertywhen heated, such as a light-to-heat-conversion (LTHC) release coating.In other embodiments, the release layer 102 may be an ultra-violet (UV)glue, which loses its adhesive property when exposed to UV lights. Therelease layer 102 may be dispensed as a liquid and cured, may be alaminate film laminated onto the carrier substrate 100, or may be thelike. The top surface of the release layer 102 may be leveled and mayhave a high degree of coplanarity.

In FIG. 5 , a dielectric layer 104 and a metallization pattern (e.g.,ground element 106A and feed lines 106B) are formed. As illustrated inFIGS. 2 , a dielectric layer 104 is formed on the release layer 102. Thebottom surface of the dielectric layer 104 may be in contact with thetop surface of the release layer 102. In some embodiments, thedielectric layer 104 is formed of a polymer, such as polybenzoxazole(PBO), polyimide, benzocyclobutene (BCB), or the like. In otherembodiments, the dielectric layer 104 is formed of a nitride such assilicon nitride; an oxide such as silicon oxide, phosphosilicate glass(PSG), borosilicate glass (BSG), boron-doped phosphosilicate glass(BPSG), or the like. The dielectric layer 104 may be formed by anyacceptable deposition process, such as spin coating, chemical vapordeposition (CVD), laminating, the like, or a combination thereof. Thedielectric layer 104 may be formed to provide a substantially planar topsurface for forming subsequent features.

The metallization pattern may include a ground element 106A and feedlines 106B, e.g., as illustrated in FIGS. 1A, 1B, and 1C. As an exampleto form the ground element 106A and the feed line 106B, a seed layer(not shown) is formed over the dielectric layer 104. In someembodiments, the seed layer is a metal layer, which may be a singlelayer or a composite layer comprising a plurality of sub-layers formedof different materials. In some embodiments, the seed layer comprises atitanium layer and a copper layer over the titanium layer. The seedlayer may be formed using, for example, PVD or the like. A photo resistis then formed and patterned on the seed layer. The photo resist may beformed by spin coating or the like and may be exposed to light forpatterning. The pattern of the photo resist corresponds to the groundelement 106A and the feed line 106B. The patterning forms openingsthrough the photo resist to expose the seed layer. A conductive materialis formed in the openings of the photo resist and on the exposedportions of the seed layer. The conductive material may be formed byplating, such as electroplating or electroless plating, or the like. Theconductive material may comprise a metal, like copper, titanium,tungsten, aluminum, or the like. Then, the photo resist and portions ofthe seed layer on which the conductive material is not formed areremoved. The photo resist may be removed by an acceptable ashing orstripping process, such as using an oxygen plasma or the like. Once thephoto resist is removed, exposed portions of the seed layer are removed,such as by using an acceptable etching process, such as by wet or dryetching. The remaining portions of the seed layer and conductivematerial form the ground element 106A and the feed line 106B.

The dielectric layer 104 and the metallization patterns formed thereon(e.g., the ground element 106A and the feed line 106B) may be referredto as a back-side metallization structure. As illustrated, the back-sidemetallization structure includes the one dielectric layers 104 and onemetallization pattern (the ground element 106A and the feed line 106B).In other embodiments, the back-side redistribution structure can includeany number of dielectric layers, metallization patterns, and vias. Forexample, the back-side redistribution may include two metallizationpatterns formed in two dielectric layers when the feed line 106B and theground element 106A are disposed in different layers (e.g., asillustrated by FIGS. 3A, 3B, and 3C). In such embodiments, the groundelement 106A may be formed over or under the feed line 106B. One or moreadditional metallization patterns and dielectric layers may be formed inthe back-side metallization structure by repeating the processes forforming the dielectric layer 104, the feed line 106B, and the groundelement 106A. Vias may be formed during the formation of a metallizationpattern by forming the seed layer and conductive material of themetallization pattern in the opening of the underlying dielectric layer.The vias may therefore interconnect and electrically couple the variousmetallization patterns (e.g., the feed lines 106B and the ground element106A in FIG. 3A).

Next in FIG. 6 , through vias 110 and (optionally) radiating antennas108 are formed. As an example to form the through vias 110 and theradiating antennas 108, a seed layer is formed over the back-sideredistribution structure, e.g., the dielectric layer 104, the groundelement 106A, and the feed lines 106B as illustrated. In someembodiments, the seed layer is a metal layer, which may be a singlelayer or a composite layer comprising a plurality of sub-layers formedof different materials. In some embodiments, the seed layer comprises atitanium layer and a copper layer over the titanium layer. The seedlayer may be formed using, for example, PVD or the like. A photo resistis formed and patterned on the seed layer. The photo resist may beformed by spin coating or the like and may be exposed to light forpatterning. The pattern of the photo resist corresponds to through vias.The patterning forms openings through the photo resist to expose theseed layer. A conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer. The conductivematerial may be formed by plating, such as electroplating or electrolessplating, or the like. The conductive material may comprise a metal, likecopper, titanium, tungsten, aluminum, or the like. The photo resist andportions of the seed layer on which the conductive material is notformed are removed. The photo resist may be removed by an acceptableashing or stripping process, such as using an oxygen plasma or the like.Once the photo resist is removed, exposed portions of the seed layer areremoved, such as by using an acceptable etching process, such as by wetor dry etching. The remaining portions of the seed layer and conductivematerial form the through vias 110 and (optionally) the radiatingantennas 108. As illustrated, the through vias 110 may be formeddirectly on portions of the ground elements 106A and the feed lines106B. In some embodiments, the through vias 110 and the radiatingantennas 108 are formed simultaneously. In other embodiments, thethrough vias 110 may be formed before or after the radiating antennas108.

In FIG. 7 , integrated circuit dies 114 are adhered to the back-sideredistribution structure (e.g., ground element 106B/feed lines 106A) bya dielectric feature 116. As illustrated in FIG. 7 , one integratedcircuit die 114 is adhered in each of the first package region 600 andthe second package region 602, and in other embodiments, more or lessintegrated circuit dies 114 may be adhered in each region. Theintegrated circuit dies 114 may be RF dies, baseband dies, logic dies(e.g., central processing unit, microcontroller, etc.), memory dies(e.g., dynamic random access memory (DRAM) die, static random accessmemory (SRAM) die, etc.), power management dies (e.g., power managementintegrated circuit (PMIC) die), sensor dies,micro-electro-mechanical-system (MEMS) dies, signal processing dies(e.g., digital signal processing (DSP) die), front-end dies (e.g.,analog front-end (AFE) dies), the like, or a combination thereof. Also,in some embodiments, the integrated circuit dies 114 may be differentsizes (e.g., different heights and/or surface areas), and in otherembodiments, the integrated circuit dies 114 may be the same size (e.g.,same heights and/or surface areas).

Before being adhered to the dielectric layer 104, the integrated circuitdies 114 may be processed according to applicable manufacturingprocesses to form integrated circuits in the integrated circuit dies114. For example, the integrated circuit dies 114 each include asemiconductor substrate 118, such as silicon, doped or undoped, or anactive layer of a semiconductor-on-insulator (SOI) substrate. Thesemiconductor substrate may include other semiconductor material, suchas germanium; a compound semiconductor including silicon carbide,gallium arsenic, gallium phosphide, indium phosphide, indium arsenide,and/or indium antimonide; an alloy semiconductor including SiGe, GaAsP,AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof.Other substrates, such as multi-layered or gradient substrates, may alsobe used. Devices, such as transistors, diodes, capacitors, resistors,etc., may be formed in and/or on the semiconductor substrate 118 and maybe interconnected by interconnect structures 120 formed by, for example,metallization patterns in one or more dielectric layers on thesemiconductor substrate 118 to form an integrated circuit.

The integrated circuit dies 114 further comprise pads 122, such asaluminum pads, to which external connections are made. The pads 122 areon what may be referred to as respective active sides of the integratedcircuit dies 114. Passivation films 124 are on the integrated circuitdies 114 and on portions of the pads 122. Openings are through thepassivation films 124 to the pads 122. Optional die connectors 126, suchas conductive pillars (for example, comprising a metal such as copper),are in the openings through the passivation films 124 and aremechanically and electrically coupled to the respective pads 122. Thedie connectors 126 may be formed by, for example, plating, or the like.The die connectors 126 electrically couple the respective integratedcircuits of the integrate circuit dies 114.

An optional dielectric material 128 is on the active sides of theintegrated circuit dies 114, such as on the passivation films 124 andthe die connectors 126. The dielectric material 128 laterallyencapsulates the die connectors 126, and the dielectric material 128 islaterally coterminous with the respective integrated circuit dies 114.The dielectric material 128 may be a polymer such as PBO, polyimide,BCB, or the like; a nitride such as silicon nitride or the like; anoxide such as silicon oxide, PSG, BSG, BPSG, or the like; the like, or acombination thereof, and may be formed, for example, by spin coating,lamination, CVD, or the like.

In other embodiments, the die connectors 126 and the dielectric material128 may be excluded, and a subsequently formed redistribution structuremay be formed directly on the passivation films 124 and the pads 122.For example, in such embodiments, the completed redistribution structure170 (see FIG. 21 ) may be formed directly on the passivation films 124and the pads 122 such that redistribution lines 138 (see FIG. 21 ) inthe redistribution structure 170 contact the pads 122.

The dielectric features 116 is on back-sides of the integrated circuitdies 114 and adheres the integrated circuit dies 114 to the back-sideredistribution structure, such as the dielectric layer 106 in theillustration. The dielectric features 116 may comprise one or morelayers of any suitable material, such as a DAF, a low-k material, a PPmaterial, a LC tape, or the like. As discussed above with respect toFIGS. 1A, 1B, and 1C, a thickness of the dielectric features 116 may beselected to improve isolation between the integrated circuit dies 114and patch antennas comprising the ground elements 106A and the feedlines 106B (e.g., the patch antenna 210 of FIGS. 1A and 1C). Contrary toconventional desires to make various layers of a semiconductor packageas thin as possible, a thickness of the dielectric features 116 may beincreased to improve isolation between the ground elements 106A/feedliens 106B and the integrated circuit die 114. In various embodiments,the thickness of the dielectric features 116 may be selected inaccordance with an operating bandwidth (e.g., frequency) of the patchantenna, a desired efficiency of the patch antenna, a k-value of thedielectric features 116, and area of the ground elements 106A in a topdown view, combinations thereof, and the like. For example, thedielectric features 116 may have any of the thicknesses d correspondingto k-values and/or operating bandwidths discussed above with respect toFIGS. 1A, 1B, and 1C. The thicknesses d may also correspond to adistance between the integrated circuit dies 114 and the ground elements106A/feed lines 106B.

Furthermore, although the dielectric features 116 are illustrates asbeing a single layer having a same width as a respective integratedcircuit die 114, the dielectric features 116 may comprise multiplelayers of different dielectric materials and/or may be wider than ornarrower than the integrated circuit dies 114 (e.g., as described abovewith respect to FIGS. 2A, 2B, 2C, 2D, and 2E). The dielectric features116 may be applied to a back-side of the integrated circuit dies 114,such as to a back-side of the respective semiconductor wafer or may beapplied over the surface of the carrier substrate 100. The integratedcircuit dies 114 may be singulated, such as by sawing or dicing, andadhered to the ground elements 106A/feed liens 106B by the dielectricfeatures 116 using, for example, a pick-and-place tool. Furthermore, thedielectric features 116 may fill a space between the ground elements106A and the feed lines 106B after the integrated circuit dies 114 areattached. For example, the dielectric features 116 may extend throughopenings in the ground elements 106A to the dielectric layer 104.

In FIG. 8 , an encapsulant 130 is formed on the various components. Theencapsulant 130 may be a molding compound, epoxy, or the like, and maybe applied by compression molding, transfer molding, or the like. Aftercuring, the encapsulant 130 can undergo a grinding process to expose thethrough vias 110, radiating antennas 108, and die connectors 126. Topsurfaces of the through vias 110, radiating antennas 108, die connectors126, and encapsulant 130 are coplanar after the grinding process. Insome embodiments, the grinding may be omitted, for example, if throughvias 110, radiating antennas 108, and die connectors 126 are alreadyexposed.

In FIGS. 9 through 18 , a front-side redistribution structure 170 (seeFIG. 18 ) is formed. As will be illustrated in FIG. 18 , the front-sideredistribution structure 170 includes dielectric layers 132, 140, 148,and 156 and metallization patterns 138, 146, and 154 (sometimes referredto as redistribution layers 138, 146, and 154 or redistribution lines138, 146, and 154).

In FIG. 9 , the dielectric layer 132 is deposited on the encapsulant130, through vias 110, radiating antennas 108, and die connectors 126.In some embodiments, the dielectric layer 132 is formed of a polymer,which may be a photo-sensitive material such as PBO, polyimide, BCB, orthe like, that may be patterned using a lithography mask. In otherembodiments, the dielectric layer 132 is formed of a nitride such assilicon nitride; an oxide such as silicon oxide, PSG, BSG, BPSG; or thelike. The dielectric layer 132 may be formed by spin coating,lamination, CVD, the like, or a combination thereof.

In FIG. 10 , the dielectric layer 132 is then patterned. The patterningforms openings to expose portions of the through vias 110, the radiatingantennas 108, and the die connectors 126. The patterning may be by anacceptable process, such as by exposing the dielectric layer 132 tolight when the dielectric layer 132 is a photo-sensitive material or byetching using, for example, an anisotropic etch. If the dielectric layer132 is a photo-sensitive material, the dielectric layer 132 can bedeveloped after the exposure.

In FIG. 11 , metallization pattern 138 with vias is formed on thedielectric layer 132. As an example to form metallization pattern 138, aseed layer (not shown) is formed over the dielectric layer 132 and inopenings through the dielectric layer 132. In some embodiments, the seedlayer is a metal layer, which may be a single layer or a composite layercomprising a plurality of sub-layers formed of different materials. Insome embodiments, the seed layer comprises a titanium layer and a copperlayer over the titanium layer. The seed layer may be formed using, forexample, PVD or the like. A photo resist is then formed and patterned onthe seed layer. The photo resist may be formed by spin coating or thelike and may be exposed to light for patterning. The pattern of thephoto resist corresponds to the metallization pattern 138. Thepatterning forms openings through the photo resist to expose the seedlayer. A conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer. The conductivematerial may be formed by plating, such as electroplating or electrolessplating, or the like. The conductive material may comprise a metal, likecopper, titanium, tungsten, aluminum, or the like. Then, the photoresist and portions of the seed layer on which the conductive materialis not formed are removed. The photo resist may be removed by anacceptable ashing or stripping process, such as using an oxygen plasmaor the like. Once the photo resist is removed, exposed portions of theseed layer are removed, such as by using an acceptable etching process,such as by wet or dry etching. The remaining portions of the seed layerand conductive material form the metallization pattern 138 and vias. Thevias are formed in openings through the dielectric layer 132 to, e.g.,the through vias 110, the radiating antennas 108, and/or the dieconnectors 126.

In FIG. 12 , the dielectric layer 140 is deposited on the metallizationpattern 138 and the dielectric layer 132. In some embodiments, thedielectric layer 140 is formed of a polymer, which may be aphoto-sensitive material such as PBO, polyimide, BCB, or the like, thatmay be patterned using a lithography mask. In other embodiments, thedielectric layer 140 is formed of a nitride such as silicon nitride; anoxide such as silicon oxide, PSG, BSG, BPSG; or the like. The dielectriclayer 140 may be formed by spin coating, lamination, CVD, the like, or acombination thereof.

In FIG. 13 , the dielectric layer 140 is then patterned. The patterningforms openings to expose portions of the metallization pattern 138. Thepatterning may be by an acceptable process, such as by exposing thedielectric layer 140 to light when the dielectric layer is aphoto-sensitive material or by etching using, for example, ananisotropic etch. If the dielectric layer 140 is a photo-sensitivematerial, the dielectric layer 140 can be developed after the exposure.

In FIG. 14 , metallization pattern 146 with vias is formed on thedielectric layer 140. As an example to form metallization pattern 146, aseed layer (not shown) is formed over the dielectric layer 140 and inopenings through the dielectric layer 140. In some embodiments, the seedlayer is a metal layer, which may be a single layer or a composite layercomprising a plurality of sub-layers formed of different materials. Insome embodiments, the seed layer comprises a titanium layer and a copperlayer over the titanium layer. The seed layer may be formed using, forexample, PVD or the like. A photo resist is then formed and patterned onthe seed layer. The photo resist may be formed by spin coating or thelike and may be exposed to light for patterning. The pattern of thephoto resist corresponds to the metallization pattern 146. Thepatterning forms openings through the photo resist to expose the seedlayer. A conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer. The conductivematerial may be formed by plating, such as electroplating or electrolessplating, or the like. The conductive material may comprise a metal, likecopper, titanium, tungsten, aluminum, or the like. Then, the photoresist and portions of the seed layer on which the conductive materialis not formed are removed. The photo resist may be removed by anacceptable ashing or stripping process, such as using an oxygen plasmaor the like. Once the photo resist is removed, exposed portions of theseed layer are removed, such as by using an acceptable etching process,such as by wet or dry etching. The remaining portions of the seed layerand conductive material form the metallization pattern 146 and vias. Thevias are formed in openings through the dielectric layer 140 to, e.g.,portions of the metallization pattern 138.

In FIG. 15 , the dielectric layer 148 is deposited on the metallizationpattern 146 and the dielectric layer 140. In some embodiments, thedielectric layer 148 is formed of a polymer, which may be aphoto-sensitive material such as PBO, polyimide, BCB, or the like, thatmay be patterned using a lithography mask. In other embodiments, thedielectric layer 148 is formed of a nitride such as silicon nitride; anoxide such as silicon oxide, PSG, BSG, BPSG; or the like. The dielectriclayer 148 may be formed by spin coating, lamination, CVD, the like, or acombination thereof.

In FIG. 16 , the dielectric layer 148 is then patterned. The patterningforms openings to expose portions of the metallization pattern 146. Thepatterning may be by an acceptable process, such as by exposing thedielectric layer 148 to light when the dielectric layer is aphoto-sensitive material or by etching using, for example, ananisotropic etch. If the dielectric layer 148 is a photo-sensitivematerial, the dielectric layer 148 can be developed after the exposure.

In FIG. 17 , metallization pattern 154 with vias is formed on thedielectric layer 148. As an example to form metallization pattern 154, aseed layer (not shown) is formed over the dielectric layer 148 and inopenings through the dielectric layer 148. In some embodiments, the seedlayer is a metal layer, which may be a single layer or a composite layercomprising a plurality of sub-layers formed of different materials. Insome embodiments, the seed layer comprises a titanium layer and a copperlayer over the titanium layer. The seed layer may be formed using, forexample, PVD or the like. A photo resist is then formed and patterned onthe seed layer. The photo resist may be formed by spin coating or thelike and may be exposed to light for patterning. The pattern of thephoto resist corresponds to the metallization pattern 154. Thepatterning forms openings through the photo resist to expose the seedlayer. A conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer. The conductivematerial may be formed by plating, such as electroplating or electrolessplating, or the like. The conductive material may comprise a metal, likecopper, titanium, tungsten, aluminum, or the like. Then, the photoresist and portions of the seed layer on which the conductive materialis not formed are removed. The photo resist may be removed by anacceptable ashing or stripping process, such as using an oxygen plasmaor the like. Once the photo resist is removed, exposed portions of theseed layer are removed, such as by using an acceptable etching process,such as by wet or dry etching. The remaining portions of the seed layerand conductive material form the metallization pattern 154 and vias. Thevias are formed in openings through the dielectric layer 148 to, e.g.,portions of the metallization pattern 146.

In FIG. 18 , the dielectric layer 156 is deposited on the metallizationpattern 154 and the dielectric layer 148. In some embodiments, thedielectric layer 156 is formed of a polymer, which may be aphoto-sensitive material such as PBO, polyimide, BCB, or the like, thatmay be patterned using a lithography mask. In other embodiments, thedielectric layer 156 is formed of a nitride such as silicon nitride; anoxide such as silicon oxide, PSG, BSG, BPSG; or the like. The dielectriclayer 156 may be formed by spin coating, lamination, CVD, the like, or acombination thereof.

The front-side redistribution structure 170 is shown as an example. Moreor fewer dielectric layers and metallization patterns may be formed inthe front-side redistribution structure 170. If fewer dielectric layersand metallization patterns are to be formed, steps and process discussedabove may be omitted. If more dielectric layers and metallizationpatterns are to be formed, steps and processes discussed above may berepeated. One having ordinary skill in the art will readily understandwhich steps and processes would be omitted or repeated.

In FIG. 19 , the dielectric layer 156 is then patterned. The patterningforms openings to expose portions of the metallization pattern 154. Thepatterning may be by an acceptable process, such as by exposing thedielectric layer 156 to light when the dielectric layer is aphoto-sensitive material or by etching using, for example, ananisotropic etch. If the dielectric layer 156 is a photo-sensitivematerial, the dielectric layer 156 can be developed after the exposure.

In FIG. 20 , pads 162 are formed on an exterior side of the front-sideredistribution structure 160. The pads 162 are used to couple toconductive connectors 166 (see FIG. 21 ) and may be referred to as underbump metallurgies (UBMs) 162. In the illustrated embodiment, the pads162 are formed through openings through the dielectric layer 156 to themetallization pattern 154. As an example to form the pads 162, a seedlayer (not shown) is formed over the dielectric layer 156. In someembodiments, the seed layer is a metal layer, which may be a singlelayer or a composite layer comprising a plurality of sub-layers formedof different materials. In some embodiments, the seed layer comprises atitanium layer and a copper layer over the titanium layer. The seedlayer may be formed using, for example, PVD or the like. A photo resistis then formed and patterned on the seed layer. The photo resist may beformed by spin coating or the like and may be exposed to light forpatterning. The pattern of the photo resist corresponds to the pads 162.The patterning forms openings through the photo resist to expose theseed layer. A conductive material is formed in the openings of the photoresist and on the exposed portions of the seed layer. The conductivematerial may be formed by plating, such as electroplating or electrolessplating, or the like. The conductive material may comprise a metal, likecopper, titanium, tungsten, aluminum, or the like. Then, the photoresist and portions of the seed layer on which the conductive materialis not formed are removed. The photo resist may be removed by anacceptable ashing or stripping process, such as using an oxygen plasmaor the like. Once the photo resist is removed, exposed portions of theseed layer are removed, such as by using an acceptable etching process,such as by wet or dry etching. The remaining portions of the seed layerand conductive material form the pads 162. In the embodiment, where thepads 162 are formed differently, more photo resist and patterning stepsmay be utilized.

In FIG. 21 , conductive connectors 166 are formed on the UBMs 162. Theconductive connectors 166 may be BGA connectors, solder balls, metalpillars, controlled collapse chip connection (C4) bumps, micro bumps,electroless nickel-electroless palladium-immersion gold technique(ENEPIG) formed bumps, or the like. The conductive connectors 166 mayinclude a conductive material such as solder, copper, aluminum, gold,nickel, silver, palladium, tin, the like, or a combination thereof. Insome embodiments, the conductive connectors 166 are formed by initiallyforming a layer of solder through such commonly used methods such asevaporation, electroplating, printing, solder transfer, ball placement,or the like. Once a layer of solder has been formed on the structure, areflow may be performed in order to shape the material into the desiredbump shapes. In another embodiment, the conductive connectors 166 aremetal pillars (such as a copper pillar) formed by a sputtering,printing, electro plating, electroless plating, CVD, or the like. Themetal pillars may be solder free and have substantially verticalsidewalls. In some embodiments, a metal cap layer (not shown) is formedon the top of the metal pillar connectors 166. The metal cap layer mayinclude nickel, tin, tin-lead, gold, silver, palladium, indium,nickel-palladium-gold, nickel-gold, the like, or a combination thereofand may be formed by a plating process.

In FIG. 22 , a carrier substrate de-bonding is performed to detach(de-bond) the carrier substrate 100 from the back-side redistributionstructure, e.g., dielectric layer 104. In accordance with someembodiments, the de-bonding includes projecting a light such as a laserlight or an UV light on the release layer 102 so that the release layer102 decomposes under the heat of the light and the carrier substrate 100can be removed. The structure is then flipped over and placed on a tape190.

In FIG. 23 , a dielectric layer 200 is formed over dielectric layer 104.In some embodiments, the dielectric layer 200 comprises a relatively lowDF material in order to achieve a suitably efficient patch antenna. Forexample, a DF of the dielectric layer 200 may be less than about 0.01 oreven less than about 0.001 in some embodiments. Furthermore, a k-valueof the dielectric layer 200 may be about 3 to about 4. In an embodiment,the thickness of the dielectric layer 200 is related to the operatingfrequency of the patch antenna 210. For example, the thickness of thedielectric layer 200 may be inversely proportional to an operatingfrequency of the patch antenna 210. In an embodiment, a thickness of thedielectric layer 200 may be in the range of about 200 µm to about 300 µmwhen the patch antenna 210 has an operating frequency of at least 60GHz. The dielectric layer 200 may be formed using any suitable process,such as, lamination. Other deposition processes (e.g., PVD, CVD, aspin-on technique, etc.) may also be used in other embodiments.

In FIG. 24 , radiating elements 204 of a patch antenna are formed overthe dielectric layer 200. In a top down view (e.g., see FIG. 1C), theradiating elements 204 may have a rectangular shape and overlap theground elements 106A/feed lines 106B although other shapes arecontemplated in other embodiments. The radiating element 204 maycomprise any suitable conductive material, such as, copper, althoughother conductive materials may be used in other embodiments. Radiatingelements 204 may be adhered on a surface of the dielectric layer 200 byan adhesive 202. In some embodiments, the adhesive 202 may be an epoxy,which is applied to the radiating elements 204 prior to adhesion on thedielectric layer 200. The radiating elements 204 may then be placed onthe dielectric layer 200 (e.g., by a pick and place tool), and theadhesive 202 may be activated (e.g., by heating) to adhere the radiatingelements 204 on the dielectric layer 200. In other embodiments, theadhesive 202 is excluded and the radiating elements 204 are directlyadhered to the dielectric layer 200. In other embodiments, the radiatingelements 204 are formed on the dielectric layer 200 using a differentmethod, such as, by depositing a seed layer, forming a patterned maskover the seed layer to define a pattern of the radiating elements 204,plating the radiating elements in openings of the patterned mask, andremoving the patterned mask and excess portions of the seed layer. Otherdeposition processes are also possible for the radiating elements 204.

The radiating elements 204 are electrically coupled to the underlyingground element 106A and feed lines 106B for the transmission andreception of wireless signals. Thus, patch antennas 210 (comprising theground elements 106A, feed lines 106B, portions of the dielectric layer200, and radiating elements 204) are formed. Each of the patch antennas210 are integrated in a same semiconductor package as an integratedcircuit dies 114 and the optional radiating antennas 108. A dielectricfeature 116 physically separates and helps isolate each of theintegrated circuit dies 114 from a respective patch antenna 210 in orderto increase the efficiency of the patch antenna 210.

After the radiating elements 204 are formed, a singulation process isperformed by sawing along scribe line regions 212 e.g., between adjacentregions 600 and 602. The sawing singulates the first package region 600from the second package region 602 to form a semiconductor package 250.

FIG. 25 illustrates the semiconductor package 250 after semiconductorpackage 250 are mounted to a substrate 400. The substrate 400 may bereferred to a package substrate 400. The package 250 is mounted to thepackage substrate 400 using the conductive connectors 166.

The package substrate 400 may be made of a semiconductor material suchas silicon, germanium, diamond, or the like. Alternatively, compoundmaterials such as silicon germanium, silicon carbide, gallium arsenic,indium arsenide, indium phosphide, silicon germanium carbide, galliumarsenic phosphide, gallium indium phosphide, combinations of these, andthe like, may also be used. Additionally, the package substrate 400 maybe a SOI substrate. Generally, an SOI substrate includes a layer of asemiconductor material such as epitaxial silicon, germanium, silicongermanium, SOI, SGOI, or combinations thereof. The package substrate 400is, in one alternative embodiment, based on an insulating core such as afiberglass reinforced resin core. One example core material isfiberglass resin such as FR4. Alternatives for the core material includebismaleimide-triazine BT resin, or alternatively, other PCB materials orfilms. Build up films such as ABF or other laminates may be used forpackage substrate 400.

The package substrate 400 may include active and passive devices (notshown in FIG. 25 ). As one of ordinary skill in the art will recognize,a wide variety of devices such as transistors, capacitors, resistors,combinations of these, and the like may be used to generate thestructural and functional requirements of the design for thesemiconductor package 500. The devices may be formed using any suitablemethods.

The package substrate 400 may also include metallization layers and vias(not shown) and bond pads 402 over the metallization layers and vias.The metallization layers may be formed over the active and passivedevices and are designed to connect the various devices to formfunctional circuitry. The metallization layers may be formed ofalternating layers of dielectric (e.g., low-k dielectric material) andconductive material (e.g., copper) with vias interconnecting the layersof conductive material and may be formed through any suitable process(such as deposition, damascene, dual damascene, or the like). In someembodiments, the package substrate 400 is substantially free of activeand passive devices.

In some embodiments, the conductive connectors 166 can be reflowed toattach the package 250 to the bond pads 402. The conductive connectors166 electrically and/or physically couple the substrate 400, includingmetallization layers in the substrate 400, to the first package 250. Insome embodiments, passive devices (e.g., surface mount devices (SMDs),not illustrated) may be attached to the package 250 (e.g., bonded to thebond pads 402) prior to mounting on the substrate 400. In suchembodiments, the passive devices may be bonded to a same surface of thepackage 250 as the conductive connectors 166.

The conductive connectors 166 may have an epoxy flux (not shown) formedthereon before they are reflowed with at least some of the epoxy portionof the epoxy flux remaining after the package 250 is attached to thesubstrate 400. This remaining epoxy portion may act as an underfill toreduce stress and protect the joints resulting from the reflowing theconductive connectors 166. In some embodiments, an underfill (not shown)may be formed between the first package 250 and the substrate 400 andsurrounding the conductive connectors 166. The underfill may be formedby a capillary flow process after the package 250 is attached or may beformed by a suitable deposition method before the package 250 isattached.

The various above embodiments have been described with respect to aspecific context, namely a package including an integrated circuit die114 and one or more integrated antennas (e.g., the patch antenna 210). Adielectric feature 116 is disposed between the integrated circuit die114 and a ground feature and/or signal line (referred to as a feed line)of the patch antenna to reduce interference. However, variousembodiments may be applied to other types of packages, which may or maynot include integrated antennas.

For example, FIGS. 26A and 26B illustrate varying views of asemiconductor package 500 according to some other embodiments. FIG. 26Aillustrates a cross-sectional view of the package 500 while FIG. 26Billustrates a top-down view of the package 500. The package 500 of FIG.26A/26B may be substantially similar to the package 500 of FIG. 25 wherelike reference numerals indicate like elements.

However, unlike the package 500 of FIG. 25 , the package 500 of FIG.26A/26B does not include a patch antenna 210. Rather, FIG. 26A/26Billustrate a package 500 comprising a coplanar waveguide (CPW) 510. CPW510 includes a signal line 502 and ground lines 504. In someembodiments, ground lines 504 provide shielding (e.g., electromagneticshielding) for the signal line 502. For example, the signal line 502 maybe disposed between and flanked by two ground lines 504 in a top downview (see FIG. 26B). The ground lines 504 may be electrically connectedto the integrated circuit die 114 and conductive features of theredistribution structure 170 by way of conductive vias 110. In someembodiments, the signal line 502 is a high frequency signal line, whichis electrically connected to the integrated circuit die 114 andconductive features of the redistribution structure 170. In someembodiments, the signal line 502 is electrically connected to theintegrated circuit die 114 and conductive features of the redistributionstructure 170 by way of a conductive via 110 (not illustrated in FIG.26A), which may be disposed in a different cross-section than FIG. 26A.

The CPW 510 may overlap the integrated circuit die 114 in a top downview. Furthermore, the CPW 510 may be physically separated from theintegrated circuit die 114 by a dielectric feature 116. The dielectricfeature 116 may help isolate the CPW 510 from interference caused by theoverlap between CPW 510 and the integrated circuit die 114. In someembodiments, the thickness of the dielectric feature 116 is selectedbased on an operating bandwidth of the CPW 510, a k-value of thedielectric feature, an area of various features of the CPW 510, adesired efficiency of CPW 510, combinations thereof, and the like.

As illustrated by FIG. 26A, the package 500 may further include optionalantennas 108 (e.g., radiating antennas). In other embodiments, theantennas 108 may be excluded. In some embodiments, another packagecomponent 600 may be bonded to a side of package 500 opposing substrate400. The package component 600 may be an integrated circuit die oranother package (e.g., comprising an encapsulated integrated circuit dieand electrical routing). For example, the package component 600 may be apackaged memory module, such as LPDDR₁, LPDDR₂, LPDDR₃, LPDDR₄, or thelike memory modules. Other types of package components 600 are alsocontemplated.

The package component 600 may be bonded to the package 500 by connectors602 (e.g., similar to connectors 166 as described above), which extendthrough a dielectric layer 512 of the package 500. Dielectric layer 512may be disposed at an exterior side of the package 500 opposite thesubstrate 400. The package component 600 may be electrically connectedto the PWG 510, the integrated circuit die 114, and conductive featuresof the redistribution structure 170 by way of conductive vias 110. Insome embodiments, the package component 600 may also be electricallyconnected to the optional antennas 108.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

In various embodiments, portions of a device (e.g., a patch antenna or aCPW) overlap at least one semiconductor chip in a top down view, andthis overlap may cause interference and reduced efficiency in the deviceif unaddressed. Thus, various embodiments improve the efficiency of thedevice and reduce interference from the semiconductor chip by disposinga dielectric feature between the semiconductor chip and the device(e.g., signal lines and ground element(s) of the device). A thickness ofthe dielectric feature is selected in order to achieve a desiredefficiency for the device. The thickness may further correspond to adistance between the device and the semiconductor chip. For example, ithas been observed that a relatively thick dielectric feature may provideimproved isolation between the device and the semiconductor chip. Insome embodiments, the thickness of the dielectric feature is selectedbased on an operating bandwidth of the device, a k-value of thedielectric feature, an area of various features of the device, a desiredefficiency of the device, combinations thereof, and the like.

In accordance with an embodiment, a package includes an integratedcircuit die encapsulated in an encapsulant, a device over the integratedcircuit die, and a dielectric feature disposed between the integratedcircuit die and the device. The device overlaps the integrated circuitdie in a top-down view. The device includes a signal line and a groundelement. A thickness of the dielectric feature is in accordance with anoperating bandwidth of the device.

In accordance with an embodiment, a method includes encapsulating anintegrated circuit die in an encapsulant and forming a conductive via inthe encapsulant and electrically connecting the integrated circuit dieto a patch antenna. The patch antenna includes a ground element, a feedline, and a radiating element electrically coupled to the ground elementand the feed line. The method further includes forming a dielectricfeature physically separating the ground element from the integratedcircuit die. A thickness of the dielectric feature is selected inaccordance with at least one of: an operating bandwidth of the patchantenna, a k-value of the dielectric feature, an area of the patchantenna, and an efficiency of the patch antenna.

In accordance with an embodiment, a method includes forming a groundelement and a feed line of a patch antenna over a carrier and attachingan integrated circuit die to the ground element of the patch antennausing a dielectric feature. A thickness of the dielectric feature isselected in accordance with an operating bandwidth of the patch antenna,a k-value of the dielectric feature, an area of the patch antenna, anefficiency of the patch antenna, or a combination thereof. The methodfurther includes forming a conductive via electrically connected to theground element and the feed line, encapsulating the integrated circuitdie and the conductive via, and electrically connecting the conductivevia to the integrated circuit die using a redistribution layer. Theredistribution layer is disposed on an opposing side of the integratedcircuit die as the ground element. The method further includeselectrically coupling a radiating element of the patch antenna to theground element and the feed line.

In accordance with another embodiment, a semiconductor package includesa device including a ground element and a signal line, an integratedcircuit die, a molding compound encapsulating the integrated circuitdie, and a dielectric feature disposed between the integrated circuitdie and the device. The device overlaps the integrated circuit die in atop-down view. The molding compound is external to the integratedcircuit die. A thickness of the dielectric feature is in accordance withan operating bandwidth of the device, a k-value of the dielectricfeature, an area of the device, an efficiency of the device, or acombination thereof.

In accordance with yet another embodiment, a semiconductor packageincludes an integrated circuit die, conductive vias adjacent to theintegrated circuit die, a molding compound encapsulating the integratedcircuit die and the conductive vias, a redistribution structure on afirst side of the integrated circuit die, a dielectric layer on a secondside of the integrated circuit die, and a device including a signal lineand a ground element. The molding compound is external to the integratedcircuit die. The conductive vias are electrically coupled to theintegrated circuit die by way of the redistribution structure. Theground element is connected to the integrated circuit die by way of theconductive vias. The dielectric layer is interposed between the deviceand the integrated circuit die. A thickness of the dielectric layer isin accordance with an operating bandwidth of the device, a k-value ofthe dielectric feature, an area of the device, an efficiency of thedevice, or a combination thereof.

In accordance with yet another embodiment, a method includes: forming aground element and a feed line of an antenna over a first side of afirst dielectric layer, the first dielectric layer being on a substrate;placing a dielectric feature and a radio frequency chip over the groundelement and the feed line, wherein a portion of the dielectric featureis interposed between the radio frequency chip and the ground element;encapsulating the radio frequency chip and the dielectric feature in anencapsulant, wherein the encapsulant is external to the radio frequencychip; detaching the substrate from the first dielectric layer; forming asecond dielectric layer on a second side of the first dielectric layer,the second side being opposite the first side; and attaching a radiatingelement of the antenna to the second dielectric layer.

In accordance with yet another embodiment, a method of manufacturing asemiconductor package includes: electroplating a ground line and asignal line over a carrier, wherein the ground line and the signal lineare components of an antenna; attaching a dielectric feature and a radiofrequency chip to the ground line, wherein the dielectric feature isattached to the radio frequency chip using an adhesive, the dielectricfeature being between the ground line and the radio frequency chip;encapsulating the radio frequency chip, the adhesive, and the dielectricfeature in an encapsulant, wherein the encapsulant is external to theradio frequency chip; and removing the carrier.

In accordance with yet another embodiment, a method of manufacturing asemiconductor package includes: attaching a radio frequency die and adielectric feature to a ground element of an antenna and a feed line ofthe antenna, the radio frequency die including a radio frequencycircuit, the dielectric feature physically contacting the groundelement, a thickness of the dielectric feature being in a range of 40 µmto 100 µm; forming an encapsulant around the radio frequency die and aconductive via, the encapsulant being external to the radio frequencydie, the dielectric feature being encapsulated by the encapsulant;electrically connecting the radio frequency die to the antenna throughthe conductive via, forming a dielectric layer on the dielectricfeature, the dielectric layer being on an opposite side of thedielectric feature from the radio frequency die; and attaching aradiating element to the dielectric layer, the radiating element beingpart of the antenna, the antenna having an operating bandwidth in arange of 57 GHz to 64 GHz and an efficiency in a range of 66.3% to 82%.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A package comprising: an integrated circuit dieencapsulated in an encapsulant; a patch antenna device over theintegrated circuit die, wherein the patch antenna device overlaps theintegrated circuit die in a top-down view, and wherein the patch antennadevice comprises a ground element and a signal line disposed in a samelayer; and a dielectric feature disposed between the integrated circuitdie and the patch antenna device, wherein a thickness of the dielectricfeature is selected based on an operating bandwidth of the patch antennadevice, wherein the dielectric feature is encapsulated in theencapsulant.
 2. The package of claim 1, wherein the dielectric featureextends between the ground element and the signal line.
 3. The packageof claim 1, wherein bottom surfaces of the ground element and the signalline are coplanar.
 4. The package of claim 1, wherein the dielectricfeature has a same width as the integrated circuit die.
 5. The packageof claim 1, wherein the dielectric feature has a different width fromthe integrated circuit die.
 6. The package of claim 1, wherein thedielectric feature comprises a die attach film (DAF).
 7. The package ofclaim 1, wherein the patch antenna device further comprises a radiatingelement over and electrically coupled to the signal line, and wherein adielectric layer is between the signal line and the radiating element.8. The package of claim 1, wherein the thickness of the dielectricfeature is further selected based on with a k-value of the dielectricfeature, an area of the device, an efficiency of the device, or acombination thereof.
 9. A package, comprising: a device comprising aground element, a signal line, a radiating element, and a firstdielectric layer, the first dielectric layer being between the groundelement and the radiating element; an integrated circuit die; adielectric feature between the device and the integrated circuit die,wherein the dielectric feature extends along sidewalls of the signalline and the ground element; and a molding compound encapsulating theintegrated circuit die and the dielectric feature, wherein the moldingcompound is external to the integrated circuit die.
 10. The package ofclaim 9, wherein the dielectric feature comprises multiple dielectriclayers.
 11. The package of claim 10, wherein one dielectric layer of themultiple dielectric layers occupies greater than 50% of a volume of thedielectric feature.
 12. The package of claim 10, wherein the multipledielectric layers have a same width.
 13. The package of claim 10,wherein the multiple dielectric layers have different widths.
 14. Thepackage of claim 10, wherein the multiple dielectric layers comprise adie attach film (DAF), a backside coating tape (LC) tape, a prepreg (PP)material, or a low-k material.
 15. A package, comprising: an integratedcircuit die; conductive vias adjacent to the integrated circuit die; amolding compound extending between a sidewall of the integrated circuitdie and a sidewall of the conductive vias; a redistribution structure ona first side of the integrated circuit die, wherein the conductive viasare electrically coupled to the integrated circuit die by way of theredistribution structure; a device comprising a signal line and a groundelement, surfaces of the ground element and the signal line beingcoplanar, the ground element being connected to the integrated circuitdie by way of the conductive vias; and a dielectric feature between theintegrated circuit die and the device, the dielectric feature furtherextending on sidewalls of the signal line.
 16. The package of claim 15,wherein the dielectric feature separates the ground element and thesignal line.
 17. The package of claim 15, wherein the devices furthercomprises one or more dielectric layers over the ground element and thesignal line, and a radiating element on the one or more dielectriclayers.
 18. The package of claim 17, wherein the integrated circuit dieoverlaps with the radiating element in top-down view.
 19. The package ofclaim 17, wherein the signal line overlaps with the radiating element intop-down view.
 20. The package of claim 15, wherein the integratedcircuit die overlaps with the signal line in top-down view.